Overview

"This text unites the numerical simulation method for the diverse fields of rarefied gas dynamics, radiative heat transfer and charge transport in semiconductors by considering the underlying transport equations as variations of the Boltzmann equation. A distinguishing feature of this work is the combination of mathematical rigour with physically motivated approximations and assumptions to examine numerical simulation techniques and industrially important applications. Special attention is given to the discussion of methods and problems in the newly emerging field of ultra low pressure gas flows in microelectronics. The quasi-""Monte Carlo"" methods, a little known but highly effective alternative to traditional ""Monte Carlo"" methods for integration and linear transport problems, is also featured. The book provides the general reader with an overview of the important issues which arise in the simulation of transport processes related to semiconductor fabrication. The specialist in one of the areas addressed should find the book a helpful introduction to the other fields."

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9783764351687

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