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OverviewFull Product DetailsAuthor: Stephen M. Rossnagel (IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York, U.S.A.) , Ronald Powell (Novellus Systems, Inc., Palo Alto, California) , Abraham Ulman (Polytechnic University, Brooklyn, New York, U.S.A.)Publisher: Elsevier Science Publishing Co Inc Imprint: Academic Press Inc Volume: v. 26 Dimensions: Width: 15.20cm , Height: 2.80cm , Length: 22.90cm Weight: 0.810kg ISBN: 9780125330268ISBN 10: 012533026 Pages: 419 Publication Date: 29 October 1998 Audience: College/higher education , Professional and scholarly , Undergraduate , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Out of stock The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationRonald A. Powell. Palo Alto, California. Novellus Systems, Inc., Palo Alto California - Stephen M. Rossnagel. Yorktown Heights, New York. IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York Tab Content 6Author Website:Countries AvailableAll regions |