Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

Author:   Toan Dinh ,  Nam-Trung Nguyen ,  Dzung Viet Dao
Publisher:   Springer Verlag, Singapore
Edition:   1st ed. 2018
ISBN:  

9789811325700


Pages:   115
Publication Date:   23 October 2018
Format:   Paperback
Availability:   Manufactured on demand   Availability explained
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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors


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Overview

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

Full Product Details

Author:   Toan Dinh ,  Nam-Trung Nguyen ,  Dzung Viet Dao
Publisher:   Springer Verlag, Singapore
Imprint:   Springer Verlag, Singapore
Edition:   1st ed. 2018
Weight:   0.454kg
ISBN:  

9789811325700


ISBN 10:   9811325707
Pages:   115
Publication Date:   23 October 2018
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Table of Contents

Introduction to SiC and Thermoelectrical Properties.- Fundamentals of Thermoelectrical Effect in SiC.- Desirable Features for High Temperature SiC Sensors.- Fabrication of SiC MEMS Sensors.- Impact of Design and Process on Performance of SiC Thermal Devices.- Applications of Thermoelectrical Effect in SiC.- Future prospects of SiC Thermoelectrical Sensing Devices.

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