Overview

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Full Product Details

Author:   Ivor Brodie ,  Julius J. Muray
Publisher:   Springer-Verlag New York Inc.
Imprint:   Springer-Verlag New York Inc.
Edition:   1st ed. Softcover of orig. ed. 1993
Dimensions:   Width: 17.00cm , Height: 3.40cm , Length: 24.40cm
Weight:   2.530kg
ISBN:  

9781441932211

ISBN 10:   1441932216
Pages:   622
Publication Date:   06 December 2010
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   In Print  
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Table of Contents

1. Preliminary Survey.- 2. Particle Beams: Sources, Optics, and Interactions.- 3. Plasmas: Physics and Chemistry.- 4. Layering Technologies.- 5. Pattern Generation.- 6. Microcharacterization.- 7. Limits to Nanofabrication.- Appendixes.- Author Index.

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