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OverviewEarlier books on this subject, i.e. Sputtering by Particle Bombardment I - III are nearly 20 years old. Since then a lot of new and important work has been performed and published in international journals. The book gives an overview on all the new results. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all researchers who need sputtering yields for physics and/or applied problems. The computational methods for calculating sputtering yields are critically reviewed and molecular dynamics calculations are also included. The influence of chemical effects on sputtering and the new models developed in the last years for understanding these effects such as for hydrogen-ion bombardment of carbon are outlined. New developments such as sputtering by MeV ions and the mechanisms for understanding the effects are presented. The new results about the angular and energy distributions of sputtered atoms are presented in an extra chapter. Full Product DetailsAuthor: Rainer Behrisch , Wolfgang EcksteinPublisher: Springer Imprint: Springer ISBN: 9786610960309ISBN 10: 6610960305 Pages: 526 Publication Date: 01 January 2007 Audience: General/trade , General Format: Electronic book text Publisher's Status: Active Availability: Out of stock  The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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