Overview

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

Full Product Details

Author:   Simon M. Sze (National Chiao Tung University, Hsinchu, Taiwan)
Publisher:   John Wiley & Sons Inc
Imprint:   Wiley-Interscience
Dimensions:   Width: 16.20cm , Height: 3.20cm , Length: 24.50cm
Weight:   0.916kg
ISBN:  

9780471546092

ISBN 10:   0471546097
Pages:   576
Publication Date:   08 November 1994
Audience:   College/higher education ,  Professional and scholarly ,  General/trade ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Author Information

S. M. SZE, PhD, is UMC Chair Professor in the Electronics Engineering Department at the National Chiao Tung University. His previous books include Semiconductor Devices; Physics of Semiconductor Devices, Second Edition; High-Speed Semiconductor Devices; and Semiconductor Sensors, all available from Wiley.

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