Overview

The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH&S technologies and disciplines. The authors have constructed a reference manual that is comprehensive in its coverage of the technical aspects of each individual subject, while at the same time addressing practical applications of each topic. The scope of this text, from its inception, was intended to address significantly more than what would typically be classified under the definition of ' safety.' However, all of the chapters have a direct application to the protection and preservation of semiconductor employees, the surrounding communities and the environment. This book is a hands-on reference to environmental, health and safety issues critical to the semiconductor industry. It was also the editor's intent to produce a text that provides a practical user's guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production wafer fabrication facilities. Contents Include: Injury and Illness of Semiconductor Workers: Experience and Epidemiologi Studies Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention Chemical Hazards in Semiconductor Operations Industrial Hygiene Electrical Hazards Radiation Safety Recognition, Evaluation and Control of Some Plasma Processing Hazards Fire Protection Technology for Semiconductor Operations Building and Fire Codes Impacting the Semiconductor Industry Gases and Gas Equipment Toxic Gas Monitoring.

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