Semiconductor Micromachining: Set

Author:   S. A. Campbell ,  H. J. Lewerenz
Publisher:   John Wiley and Sons Ltd
Edition:   Volumes 1 – 2
ISBN:  

9780471980841


Pages:   736
Publication Date:   27 March 1998
Format:   Hardback
Availability:   In Print   Availability explained
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

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Semiconductor Micromachining: Set


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Overview

A one-stop reference for semiconductor principles and construction Semiconductor Micromachining is a two-volume set that coordinates the multidisciplinary nature of the field into a single comprehensive reference. Volume 1: Fundamental Electrochemistry and Physics builds a robust foundation of semiconductor concepts, and Volume 2: Techniques and Industrial Applications provides in-depth guidance on the practical aspects of the technology. Appropriate for graduate studies or scientists in academia and industry, this book provides a convenient reference for those who wish to expand their understanding of semiconductor technology.

Full Product Details

Author:   S. A. Campbell ,  H. J. Lewerenz
Publisher:   John Wiley and Sons Ltd
Imprint:   John Wiley & Sons Ltd
Edition:   Volumes 1 – 2
Dimensions:   Width: 16.90cm , Height: 5.70cm , Length: 23.90cm
Weight:   1.354kg
ISBN:  

9780471980841


ISBN 10:   0471980846
Pages:   736
Publication Date:   27 March 1998
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   In Print   Availability explained
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

Table of Contents

Volume 1 Electrochemical and Photochemical Properties of Semiconductors S. Morrison Chemical and Electrochemical Etching of Semiconductors J. Kelly and D. Vanmaekelbergh Photoetching of III-V Semiconductors: Basic Photoelectrochemical Principles W. Plieth and S. Wetzenstein Influence of Photoelectrochemical Etching on Electronic Properties of Semiconductor Surfaces R. Tenne Surface Conditioning of Silicon by Photoelectrochemical Etching C. Levy-Clement Electrochemical Conditioning of Silicon: Surface Analyses and Electronic Implications H. Lewerenz and H. Jungblut The Formation of Porous Silicon D. Riley Index Volume 2 Anisotrophy and the Micromachining of Silicon A. Campbell, et al. Etch Stops S. Collins Photonic Integrated Circuits, Technology and Concepts R. Matz Monolithically Integrated Sensors for Mechanical Quantities in Standard CMOS Processing H. Offereins, et al. Silicon on Insulators C. Harendt and G. Roos Integrated Sensors and Actuators N. Najaft Smart Sensors N. Najaft and J. Moyne Anodic Oxidation of Silicon as a Low-Temperature Passivation Technique G. Mende Micromachined Optoelectronic Structures and Devices P. Deimel Wet and Dry Etching: A Comparison in the Context of Solid State Electronics Applications K. Bachmann Index

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Author Information

S. A. Campbell is the editor of Semiconductor Micromachining, 2 Volume Set, published by Wiley. H. J. Lewerenz is the editor of Semiconductor Micromachining, 2 Volume Set, published by Wiley.

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