Overview

The growth and advancement of the electronics and photonics industry in the 21st century hinges on revolutionary new manufacturing techniques that will overcome some of the most fundamental limitations of conventional methods. Rapid thermal processing (RTP) based on incoherent radiation as the source of optical and thermal energy is playing a major role in providing processing systems that offer the tight process control, lower thermal budget, lower microscopic defects and lower cost of ownership required for a large number of semiconductor devices. Operating principles, related technology, applications and manufacturing issues are discussed at the graduate and advanced research level. In addition to the fast cycle time manufacturing applications in semiconductor and related processing, potential applications in other low thermal mass systems (eg. tapes, fibres, and wires etc.) as well as for micro-electro-mechanical systems (MEMS) are described.

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