Overview

This study describes a technique in wide-spread use for the production of high-quality semiconductor devices. It discusses the most important aspects of the MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural parameters of the grown (or growing) film or structure to the technologically relevant procedure. In this edition two new fields have been added: crystallization of as-grown low-dimensional heterostructures, mainly quantum wires and quantum dots and in-growth control of the MBE crystallization process of strained-layer structures.

Full Product Details

Author:   M.A. Herman (Polish Academy of Sciences, Warsaw, Poland) ,  H. Sitter (University of Linz, Austria)
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   2nd edition
Volume:   Vol 7
Dimensions:   Width: 16.30cm , Height: 2.60cm , Length: 24.20cm
Weight:   0.826kg
ISBN:  

9783540605942

ISBN 10:   3540605940
Pages:   467
Publication Date:   17 September 1996
Audience:   General/trade ,  Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock  
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