Overview

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

Full Product Details

Author:   Raja Nassar ,  Weizhong Dai
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   Softcover reprint of hardcover 1st ed. 2003
Dimensions:   Width: 15.50cm , Height: 1.40cm , Length: 23.50cm
Weight:   0.454kg
ISBN:  

9783642055362

ISBN 10:   3642055362
Pages:   270
Publication Date:   08 December 2010
Audience:   Professional and scholarly ,  Professional and scholarly ,  Professional & Vocational ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Manufactured on demand  
We will order this item for you from a manufactured on demand supplier.

Table of Contents

Reviews

From the reviews: This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ... the book provides a fairly complete view of the modeling of microfabrication processes. ... `It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'. (Gregory Guisbiers, Physicalia, Vol. 26 (1), 2004)

From the reviews: This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ... the book provides a fairly complete view of the modeling of microfabrication processes. ... 'It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'. (Gregory Guisbiers, Physicalia, Vol. 26 (1), 2004)

From the reviews: This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ! the book provides a fairly complete view of the modeling of microfabrication processes. ! 'It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'. (Gregory Guisbiers, Physicalia, Vol. 26 (1), 2004)

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