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Overview"Quoting from the preface, ""Most of the authors of this book are well known specialists in different areas of microwave plasma physics, technique and plasma processing. Topics cover all problems of theory, experiments and applications of microwave discharges and yield the state-of-the-art trends in discharge theory, modelling, and diagnostics, methods of microwave plasma generation, high and low pressure microwave discharges, interaction of microwaves with a plasma, applications of microwave plasma (surface treating, etching, film deposition, growth of structures, light sources, analytical chemistry, etc.) We hope that this book will be useful for all specialists who work in low temperature plasma physics and processing." Full Product DetailsAuthor: Yu A LebedevPublisher: Wexford College Press Imprint: Wexford College Press Dimensions: Width: 15.60cm , Height: 1.80cm , Length: 23.40cm Weight: 0.603kg ISBN: 9781934939086ISBN 10: 1934939080 Pages: 304 Publication Date: 28 December 2007 Audience: General/trade , General Format: Hardback Publisher's Status: Active Availability: Awaiting stock  The supplier is currently out of stock of this item. It will be ordered for you and placed on backorder. Once it does come back in stock, we will ship it out for you. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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