Overview

Push extreme ultraviolet imaging beyond traditional correction limits with a practical, end-to-end guide to pupil engineering using metasurface pellicles. This book unifies vector imaging, metasurface electromagnetics, and manufacturing constraints to deliver phase and polarization pre-distortion that cancels mask 3D shadowing, balances s/p transmission, and suppresses field-dependent aberrations in high-NA EUV. The result is a measurable reduction of edge placement error and MEEF at 2 nm and 3 nm nodes. Build a complete workflow that treats the pellicle as a complex Jones pupil filter optimized with realistic dispersion, absorption, and thermal mechanics at 13.5 nm. Learn how to synthesize implementable targets from Zernike budgets, compensate asymmetry from oblique incidence, and co-optimize with source shape, mask stack, and field sampling. Tie actinic metrology directly to pre-correction through calibrated phase retrieval and robust model fitting. Every chapter includes full Python code demos. Implement Hopkins and coherent-mode imaging, polarization-resolved Jones pupils, and compact mask 3D models. Train fast RCWA and FDTD surrogates, run adjoint inverse design, and execute robust optimization with fabrication tolerances, contamination drift, and mechanical noise. Generate FEM sweeps, NILS and stochastic proxies, and production-grade benchmarks that translate directly to EPE and MEEF improvements. The final sections walk through deployment, QA gates, and run-to-run control so gains survive real tool variability. If you need a practical path to pupil pre-correction with metasurfaces that stands up to thermal load, variability, and stochastic resist limits, this book provides the algorithms, data models, and code you can run on day one.

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