Overview

This work presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.

Full Product Details

Author:   H. Gnaser (University of Kaiserslautern, Germany)
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   illustrated edition
Volume:   Vol 146
Weight:   0.590kg
ISBN:  

9783540650072

ISBN 10:   3540650075
Pages:   302
Publication Date:   11 December 1998
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Temporarily unavailable  
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