Overview

The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.

Full Product Details

Author:   Jiro Matsuo ,  Masataka Kase ,  Takaaki Aoki ,  Toshio Seki
Publisher:   American Institute of Physics
Imprint:   American Institute of Physics
Edition:   2011 ed.
Volume:   1321
Dimensions:   Width: 22.10cm , Height: 3.60cm , Length: 27.90cm
Weight:   1.456kg
ISBN:  

9780735408760

ISBN 10:   0735408769
Pages:   532
Publication Date:   25 January 2011
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Mixed media product
Publisher's Status:   Active
Availability:   In Print  
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