Overview

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

Full Product Details

Author:   Y. Naka ,  K. Sugawara ,  C. McGreavy
Publisher:   Springer
Imprint:   Springer
Edition:   Softcover reprint of the original 1st ed. 1993
Dimensions:   Width: 15.50cm , Height: 1.20cm , Length: 23.50cm
Weight:   0.355kg
ISBN:  

9789401046824

ISBN 10:   9401046824
Pages:   210
Publication Date:   21 October 2012
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Manufactured on demand  
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Table of Contents

1 Coming age of VLSI.- 1.1 Functionality.- 1.2 Use in consumer products.- 1.3 Impact on industry.- 1.4 Future trends.- 2 Semiconductor market.- 2.1 Features of the semiconductor industry.- 2.2 Types and classification of semiconductors.- 2.3 Expanding semiconductor market.- 2.4 Trends in associated industries.- 2.5 Future prospects.- 3 Evolution of semiconductors.- 3.1 History of semiconductor technology.- 3.2 Future developments.- 4 Characteristics of VLSI.- 4.1 Device structures.- 4.2 Memory types.- 4.3 Arrangement of VLSI devices.- 4.4 New devices.- 5 VLSI process engineering operations.- 5.1 Aspects of production.- 5.2 Basic processing technology.- 6 Packaging and process monitoring technology.- 6.1 Packaging.- 6.2 Process monitoring techniques.- 7 Production of silicon wafers and environmental problems.- 7.1 Silicon wafers.- 7.2 Chemicals used in VLSI processing.- 7.3 Environmental considerations.- 8 Process engineering aspects of VLSI production.- 8.1 Basic issues in processing.-8.2 Opportunities for innovation.- Appendix A Glossary.- Appendix B List of abbreviations.- References.

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...an extremely good text... - Microelectronics Journal

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