Overview

Interactions of Ions with Condensed Matter, Volume 229

Full Product Details

Author:   Arvaidas Galdikas ,  Liudvikas Pranevieius
Publisher:   Nova Science Publishers Inc
Imprint:   Nova Science Publishers Inc
Volume:   v. 220
Weight:   0.560kg
ISBN:  

9781560726661

ISBN 10:   1560726660
Pages:   176
Publication Date:   12 September 2000
Audience:   College/higher education ,  General/trade ,  Postgraduate, Research & Scholarly ,  General
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

Contents: Sputtering of Monoelemental Solids -- Ion Energy Losses; Collision Cascades; Physical Sputtering. Sputtering of Multielement Solids -- Preferential Sputtering; Modelling of Preferential Sputtering. Formation of the Altered Layer -- Collisional Mixing; Modelling of Collisional Mixing; Thermal Diffusion; Radiation Enhanced Diffusion; Radiation Enhanced Diffusion and Sputtering; Preferential Sputtering and Interdiffusion; Radiation Activated Temperature Gradient Diffusion; Segregation. Surface Topography -- Development of Surface Roughness; Roughening Effects on Ion Beam Profiling of Multilayers; Modelling of Sputtering of Multilayers. Heterogeneous Processes in Reactive Plasma -- Plasmochemical Etching; Model of Etching Kinetics; Etching Profiles; Modelling of Etching Through a Mask.

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Arvaidas Galdikas and Liudvikas Pranevieius

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