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OverviewThis book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length course on integrated circuit fabrication. This text can also serve as a reference for practicing engineer and scientist in the semiconductor industry. IC Fabrication are ever demanding of technology in rapidly growing industry growth opportunities are numerous. A recent survey shows that integrated circuit currently outnumber humans in UK, USA, India and China. The spectacular advances in the development and application of integrated circuit technology have led to the emergence of microelectronic process engineering as an independent discipline. Integrated circuit fabrication text books typically divide the fabrication sequence into a number of unit processes that are repeated to form the integrated circuit. The effect is to give the book an analysis flavor: a number of loosely related topics each with its own background material. Note: T& F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka. Full Product DetailsAuthor: Shubham Kumar , Ankaj GuptaPublisher: Taylor & Francis Ltd Imprint: CRC Press Weight: 0.625kg ISBN: 9781032014296ISBN 10: 1032014296 Pages: 336 Publication Date: 29 April 2021 Audience: College/higher education , Tertiary & Higher Education Format: Hardback Publisher's Status: Active Availability: In Print ![]() This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of Contents1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process IntegrationReviewsAuthor InformationKumar Shubham, Delhi Technical Campus, Uttar Pradesh, India Ankaj Gupta, Delhi Technical Campus, Uttar Pradesh, India Tab Content 6Author Website:Countries AvailableAll regions |