Overview

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

Full Product Details

9780367397166

Table of Contents

Reviews

recommended for special libraries and academic libraries serving graduate level programs in these areas. - E-Streams a cornerstone reference source.uniquely ample and thorough. -Semiconductor International a formative instrument. contains valuable and very new information.an instructive and valuable book. -IASI Polytechnic Magazine Promo Copy

Author Information

Alain C. Diebold

Tab Content 6

Customer Reviews

Recent Reviews

Countries Available