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OverviewFull Product DetailsAuthor: Mitsuharu KonumaPublisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Imprint: Springer-Verlag Berlin and Heidelberg GmbH & Co. K Volume: v. 10 Weight: 0.470kg ISBN: 9783540540571ISBN 10: 3540540571 Pages: 224 Publication Date: 30 April 1992 Audience: College/higher education , Professional and scholarly , Postgraduate, Research & Scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Out of stock The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of Contents1. The Plasma State.- 1.1 Characterization of Plasma.- 1.1.1 The Temperature of the Plasma.- 1.1.2 Plasma Density.- 1.1.3 Plasma Oscillation.- 1.2 Classification of Plasma.- 1.2.1 Cold Plasma.- 1.2.2 Thermal Plasma.- 2. Reactions in Plasmas.- 2.1 Collision Phenomena.- 2.1.1 Velocity Distribution of Particles.- 2.1.2 Elastic and Inelastic Collisions.- 2.1.3 Collision Frequency and Mean-Free Path.- 2.1.4 Reaction Cross Section.- 2.2 Excitation and Ionization.- 2.2.1 Internal Energy.- 2.2.2 Excitation and Ionization Processes.- 2.2.3 Excitation and Ionization by an Electron Collision.- a) Excitation and Ionization of an Atom.- b) Excitation and Ionization of a Molecule.- 2.2.4 Excitation and Ionization by Collisions of Energetic Ions or Neutral Particles.- a) Thermal Ionization.- b) Penning Ionization.- c) Ionization by Collisions Among Excited Particles.- 2.2.5 Photo-Excitation and Photo-Ionization.- 2.3 Recombination.- 2.3.1 Recombination Processes.- 2.3.2 Ion-Electron Recombination.- 2.3.3 Ion-Ion Recombination.- 2.4 Ion-Molecule Reactions and Reactions Involving Negative Ions.- 2.4.1 Attachment and Detachment.- 2.4.2 Ion-Molecule Reaction.- 2.5 Transport Phenomena.- 2.5.1 Drift.- 2.5.2 Diffusion.- 3. Generation of Cold Plasma.- 3.1 Electrical Breakdown and Starting Voltage.- 3.1.1 Static Electric Field.- 3.1.2 Alternating Electric Field.- 3.2 Glow Discharge.- 3.2.1 General Characteristics.- 3.2.2 Potential Distribution.- 3.2.3 Normal Glow and Abnormal Glow.- 3.2.4 Hollow Cathode Discharge.- 3.3 High-Frequency Discharge.- 3.3.1 Generation of High-Frequency Discharge.- 3.3.2 Potential Distribution and Self-Bias.- 3.3.3 Plasma Potential.- 3.4 Microwave Discharge.- 3.4.1 Generation of Microwave Discharge.- 3.4.2 Electron Cyclotron Resonance.- 4. Plasma Diagnostics.- 4.1 Optical Spectroscopy.- 4.1.1 Optical Emission Spectroscopy.- 4.1.2 Optical Absorption Spectroscopy.- 4.1.3 Laser-Induced Fluorescence Spectroscopy.- 4.1.4 Coherent Anti-Stokes Raman Spectroscopy.- 4.1.5 Optogalvanic Spectroscopy.- 4.2 Probes.- 4.2.1 Langmuir Single Probe.- 4.2.2 Double Probe.- 4.2.3 Emissive Probe.- 4.3 Particle Measurements.- 4.3.1 Mass Spectrometry.- 4.3.2 Energy Analysis of Ions.- 4.4 Others.- 4.4.1 Electron-Spin Resonance.- 4.4.2 Microwave Diagnostics.- 5. Cold Plasma and Thin Film Formation.- 5.1 Interactions of Cold Plasma with Solid Surfaces.- 5.1.1 Adsorption and Trapping.- 5.1.2 Sputtering.- 5.1.3 Secondary-Electron Emission.- 5.1.4 Chemical Reactions on Solid Surfaces.- 5.2 Application of Cold Plasma to Thin Film Deposition.- 5.2.1 Classification of Deposition Processes.- 5.2.2 General Considerations of Plasma Processes.- 6. Physical Vapor Deposition Under Plasma Conditions.- 6.1 Sputter Deposition.- 6.1.1 Features of Sputter Deposition.- 6.1.2 Reactor Configuration.- 6.1.3 Reactive Sputter Deposition.- 6.1.4 Morphology and Characteristics of the Films.- 6.2 Ion Plating.- 6.2.1 Reactor Types and Features.- 6.2.2 Applications of Ion Plating.- 7. Chemical Vapor Deposition Under Plasma Conditions.- 7.1 Plasma-Enhanced Chemical Vapor Deposition.- 7.1.1 Reaction Mechanisms.- 7.1.2 System Design.- 7.1.3 Applications of Plasma Enhanced CVD.- a) Amorphous Silicon.- b) Silicon Nitride.- c) Amorphous and Diamond-Like Carbon.- d) Other Materials.- 7.2 Plasma Polymerization.- 7.2.1 Features of Plasma Polymerization.- 7.2.2 System Design.- 7.2.3 Plasma Polymer.- 7.3 Other Techniques.- 7.3.1 Plasma Stream Transport.- 7.3.2 Chemical Transport in Plasmas.- 7.3.3 Film Deposition Using Electron Cyclotron Resonance Plasma Sources.- 8. Surface Modification by Cold Plasma.- 8.1 Surface Treatment for Metals and Semiconductors.- 8.1.1 Ion Nitriding and Ion Carburizing.- 8.1.2 Plasma Nitriding.- 8.1.3 Plasma Oxidation and Plasma Anodization.- 8.1.4 Hydrogen Neutralization in Semiconductors.- 8.1.5 Other Techniques for Metal Surface Treatment.- 8.2 Modification of Polymer Surfaces.- References.- Further Reading.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |