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OverviewFull Product DetailsAuthor: National Research Council , Division on Engineering and Physical Sciences , Commission on Physical Sciences, Mathematics, and Applications , Panel on Database Needs in Plasma ProcessingPublisher: National Academies Press Imprint: National Academies Press ISBN: 9780309055918ISBN 10: 0309055911 Pages: 74 Publication Date: 21 November 1996 Audience: Professional and scholarly , Professional & Vocational Format: Paperback Publisher's Status: Active Availability: In Print  This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of Contents1 Front Matter; 2 Executive Summary; 3 1 Industrial Perspectives; 4 2 Tool Scale and Feature Scale Models; 5 3 Radiative Processes and Diagnostics; 6 4 Heterogeneous Processes; 7 5 Electron Collision Processes; 8 6 Ion Processes, Neutral Chemistry, and Thermochemical Data; 9 Appendix A: Acronyms and Abbreviations; 10 Appendix B: Workshop Agenda; 11 Appendix C: Workshop ParticipantsReviewsAuthor InformationPanel on Database Needs in Plasma Processing, National Research Council Tab Content 6Author Website:Countries AvailableAll regions |
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