Overview

This study recognizes the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology. It provides in-depth and advanced treatment on the origins, procedures and disposal of a variety of contaminants and ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS).

Full Product Details

Author:   Robert P. Donovan
Publisher:   Taylor & Francis Inc
Imprint:   CRC Press Inc
Dimensions:   Width: 15.20cm , Height: 2.60cm , Length: 22.90cm
Weight:   0.680kg
ISBN:  

9780824703806

ISBN 10:   0824703804
Pages:   460
Publication Date:   14 March 2001
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print  
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Robert P. Donovan

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