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OverviewThis wide-ranging volume covers recent developments in the theoretical understanding of the chemistry and physics of chemical vapour deposition (CVD). Contributors are drawn from both academia and industry to achieve a balaced coverage of the subject. The volume emphasizes principles and understanding rather than details of specific materials or processes. Specific examples are given to illustrate the principles. Full Product DetailsAuthor: M. L. Hitchman (University of Strathclyde) , K. F. Jensen (Massachusetts Institute of Technology) , M. L. HitchmanPublisher: Elsevier Science Publishing Co Inc Imprint: Academic Press Inc Dimensions: Width: 15.20cm , Height: 3.90cm , Length: 22.90cm Weight: 1.150kg ISBN: 9780123496706ISBN 10: 0123496705 Pages: 677 Publication Date: 26 January 1993 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Out of Print Availability: In Print  Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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