阴极，反应气体和磁控溅射
Author:   Diederik Depla ,  董 强
Publisher:   Lulu Press Inc
ISBN:  

9781470949464


Pages:   394
Publication Date:   21 December 2022
Format:   Hardback
Availability:   In stock   Availability explained
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阴极，反应气体和磁控溅射


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Overview

"This book is the Chinese version of the handbook ""Reactive gases, sputtering and magnetrons."" The book discusses all fundamental aspects of reactive magnetron sputtering. It includes chapters on sputtering, magnetron discharge, target processes, film growth and stress evolution. It also provide review question for each chapter. The last chapter is a practical guide."

Full Product Details

Author:   Diederik Depla ,  董 强
Publisher:   Lulu Press Inc
Imprint:   Lulu.com
Dimensions:   Width: 15.20cm , Height: 2.20cm , Length: 22.90cm
Weight:   0.694kg
ISBN:  

9781470949464


ISBN 10:   1470949466
Pages:   394
Publication Date:   21 December 2022
Audience:   General/trade ,  General
Format:   Hardback
Publisher's Status:   Active
Availability:   In stock   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.
Language:   Chinese

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