Overview

Understanding the details of wafer fabrication processes and the related aspects of electronic devices can be an overwhelming task in the absence of a systematic, comprehensive view of the technology. This book aims to provide this perspective. The author presents a complete treatment of both the technology of wafer fabrication and the factories where it occurs, while presenting methods for the analysis and prediction of the performance of these factories. Offering a comprehensive understanding of the ""wafer fab"" process, this book is intended for a wide range of engineers and managers in the electronics industry.

Full Product Details

Author:   Linda F. Atherton ,  Robert W. Atherton
Publisher:   Springer
Imprint:   Springer
Edition:   1996 ed.
Volume:   339
Dimensions:   Width: 15.60cm , Height: 2.60cm , Length: 23.40cm
Weight:   1.900kg
ISBN:  

9780792396192

ISBN 10:   0792396197
Pages:   468
Publication Date:   30 November 1995
Audience:   Professional and scholarly ,  General/trade ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print  
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Table of Contents

1. Introduction to the Electronic Industry.- 1.0 Introduction.- 1.1 Wafer Fabrication.- 1.2 Wafer Fabrication Factories.- 1.3 Wafer Fabrication Equipment.- 1.4 Circuit Design to Wafer Fab: The Interface.- 1.5 Manufacturing Economics.- 1.6 Fab Performance Analysis.- 1.7 Methods of Performance Analysis.- 1.8 Archetypes of Wafer Fabs.- Further Reading and Notes.- References.- Exercises.- 2. Factory Phenomena.- 2.0 Introduction: Peeling the Onion.- 2.1 Fundamental Entities in Wafer Fabrication.- 2.2 Factory Dynamics.- 2.3 Yield and Process Control.- 2.4 Fallacies in Wafer Fabrication.- Further Reading and Notes.- References.- Exercises.- 3. Processes for Wafer Fabrication.- 3.0 Introduction.- 3.1 Semiconductor Process Technology.- 3.2 Multilevel Interconnect.- 3.3 The Chemical Reactors of Wafer Fabrication.- 3.4 Wafer Cleaning.- 3.5 Photoresist Processing.- 3.6 Plasma Etching.- 3.7 Other Processes.- 3.8 Summary.- Further Reading and Notes.- References.- Exercises.- 4. Fab Graphs and Static Analyses.- 4.0 Introduction.- 4.1 Factory Representation Using Fab Graphs.- 4.2 Drawing Fab Graphs.- 4.3 Fab Layout.- 4.4 Fab Flexibility.- 4.5 Rules of Thumb for Drawing Fab Graphs.- 4.6 Multiple Process Flows and Engineering Lots.- 4.7 Using Fab Graphs with Tracking Data.- 4.8 Static Capacity Planner.- Further Reading and Notes.- References.- Exercises.- 5. Factory Performance Basics.- 5.0 Introduction.- 5.1 Factory Performance Definitions.- 5.2 Inexorably-Bound Factory Performance Relationships.- 5.3 Operations Policy and Fab Performance.- 5.4 The Role of the Controlling Bottleneck.- 5.5 The Pros and Cons of Burst Capacity.- 5.6 Factory Performance Trade-offs.- 5.7 Summary.- Further Reading and Notes.- References.- Exercises.- 6. Advanced Performance Concepts.- 6.0 Introduction.- 6.1 Multiple Process Flows.- 6.2 Setup Rules.- 6.3 Batching Rules.- 6.4 Dispatching Rules.- 6.5 Engineering or Development Lots.- 6.6 Bottleneck and Capacity Estimator.- 6.7 Process Creep.- 6.8 Process Migration.- 6.9 Equipment Availability.- 6.10 Achieving Good Factory Performance.- Further Reading and Notes.- References.- Exercises.- 7. Factory Modeling.- 7.0 Introduction.- 7.1 Fab Graphs.- 7.2 Process/Equipment/Lot Interactions.- 7.3 Discrete Event Simulation.- 7.4 Lot Starts.- 7.5 Factory System Behavior.- 7.6 Fundamental Performance Analyses.- 7.7 Workstation Dynamics.- 7.8 Queueing Dynamics.- 7.9 Lot Dynamics.- 7.10 Lot Completions.- 7.11 Synthetic Experience.- 7.12 Sensitivity Analysis.- 7.13 Modeling Methods in General.- 7.14 Cluster Tool Modeling.- Further Reading and Notes.- References.- Exercises.- 8. Cluster Tools.- 8.0 Introduction.- 8.1 Mini-factories.- 8.2 Manufacturing Simplification.- 8.3 Types of Cluster Tools.- 8.4 Configuring Cluster Tools.- 8.5 System Dynamics.- 8.6 Clustering for Manufacturing Performance.- 8.7 Summary.- References.- Exercises.- Projects.- 9. Performance Economics.- 9.0 Introduction.- 9.1 Cost Allocation by Resource Consumption.- 9.2 Contributors to Wafer Cost.- 9.3 Wafer Costing and the Evolving Factory.- 9.4 Cost per Good Die.- 9.5 Summary.- Further Reading and Notes.- References.- Exercises.

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