Three-Dimensional Simulation of Semiconductor Devices

Author:   Roland Kircher ,  Wolfgang Bergner
Publisher:   Springer Basel
Edition:   Softcover reprint of the original 1st ed. 1991
ISBN:  

9783034877329


Pages:   124
Publication Date:   14 December 2012
Format:   Paperback
Availability:   Available To Order   Availability explained
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Three-Dimensional Simulation of Semiconductor Devices


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Overview

The three-dimensional device simulation has become a necessary tool for the design and investigation of complex device structures. The evolution of the three-dimensional simulation tools is directly linked to the scaling of the devices and the increasing complex- ity of dynamic random access memory (DRAM) cells. Scaling of MOSFET devices led to a three-dimensional geometry with effects which cannot be handled by two-dimensional simulations anymore. With increasing integration density in DRAMs the third dimen- sion had to be utilized to realize the storage capacitor. The result- ing leakage problems have to be investigated and the cell design optimized by means of three-dimensional simulations. This book is intended for senior undergraduate students in applied physics, electrical engineering and computational physics, as well as for scientists and engineers involved in semiconductor device re- search and development. It is also intended for software engineers and all those who are concerned with simulation. The book will give an overview on the problems and activities con- cerning three-dimensional device simulation, without the claim of being a classical textbook. It starts from the classical semiconduc- tor equations, discusses the physical models used in device simu- lation, describes the discretization and some numerical methods for solving the differential equations. The application of the three- dimensional simulation to VLSI device engineering is illustrated by a few specific examples.

Full Product Details

Author:   Roland Kircher ,  Wolfgang Bergner
Publisher:   Springer Basel
Imprint:   Springer Basel
Edition:   Softcover reprint of the original 1st ed. 1991
Dimensions:   Width: 15.20cm , Height: 0.70cm , Length: 22.90cm
Weight:   0.205kg
ISBN:  

9783034877329


ISBN 10:   3034877323
Pages:   124
Publication Date:   14 December 2012
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Available To Order   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.
Language:   German

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