Overview

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts. Key topics: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses; Covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.

Full Product Details

Author:   Kiyotaka Wasa ,  Makoto Kitabatake ,  Hideaki Adachi
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   2004
Dimensions:   Width: 15.50cm , Height: 2.70cm , Length: 23.50cm
Weight:   0.787kg
ISBN:  

9783642059315

ISBN 10:   3642059317
Pages:   518
Publication Date:   02 January 2013
Audience:   Professional and scholarly ,  Professional and scholarly ,  Professional & Vocational ,  Postgraduate, Research & Scholarly
Format:   Paperback
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

Thin Film Materials And Devices.- Thin Film Processes.- Sputtering Phenomena.- Sputtering Systems.- Deposition Of Compound Thin Films.- Structural Control Of Compound Thin Films.- Microfabrication By Sputtering.- Appendix.- Index.

Reviews

From the reviews: The book starts by defining thin film materials and describing the basics of their nucleation and growth. ! I found the book useful and would not hesitate to recommend it as essential reading to anyone who is entering the field of sputter deposition, particularly the deposition of compound materials. (Dr. Charles A. Bishop, Materials World, Vol. 14 (10), 2006)

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