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OverviewAn invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. Full Product DetailsAuthor: Kiyotaka Wasa , Makoto Kitabatake (Matsushita Electric Ltd., Japan) , Hideaki Adachi (Matsushita Electric Ltd., Japan)Publisher: William Andrew Publishing Imprint: William Andrew Publishing Dimensions: Width: 15.20cm , Height: 3.70cm , Length: 22.90cm Weight: 0.984kg ISBN: 9780815514831ISBN 10: 0815514832 Pages: 532 Publication Date: 31 December 2004 Audience: College/higher education , Adult education , Tertiary & Higher Education , Further / Higher Education Format: Hardback Publisher's Status: Out of Print Availability: Out of stock  Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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