Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

Author:   Krishna Seshan ,  Krishna Seshan (Formerly Assistant Professor, Materials Science, University of Arizona)
Publisher:   William Andrew Publishing
Edition:   2nd Revised edition
ISBN:  

9780815514428


Pages:   658
Publication Date:   01 February 2002
Replaced By:   9781437778731
Format:   Hardback
Availability:   In stock   Availability explained
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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon


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The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

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Author:   Krishna Seshan ,  Krishna Seshan (Formerly Assistant Professor, Materials Science, University of Arizona)
Publisher:   William Andrew Publishing
Imprint:   William Andrew Publishing
Edition:   2nd Revised edition
Dimensions:   Width: 15.20cm , Height: 3.90cm , Length: 22.90cm
Weight:   1.156kg
ISBN:  

9780815514428


ISBN 10:   0815514425
Pages:   658
Publication Date:   01 February 2002
Audience:   Professional and scholarly ,  Professional & Vocational
Replaced By:   9781437778731
Format:   Hardback
Publisher's Status:   Active
Availability:   In stock   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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Krishna Seshan was an Assistant Professor in Materials Science at the University of Arizona with extensive professional experience as a technologist at both IBM and Intel Corporations. Dr. Seshan passed away in 2017.

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