Overview

This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.

Full Product Details

Author:   S.J. Moss ,  A. Ledwith
Publisher:   Kluwer Academic Publishers Group
Imprint:   Kluwer Academic Publishers
Edition:   1989 ed.
Dimensions:   Width: 21.00cm , Height: 2.50cm , Length: 29.70cm
Weight:   1.760kg
ISBN:  

9780216920057

ISBN 10:   0216920051
Pages:   426
Publication Date:   28 February 1989
Audience:   Adult education ,  College/higher education ,  Further / Higher Education ,  Undergraduate
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print  
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Table of Contents

Reviews

'The style and excellent choice of topics and material covered makes this book an ideal starting point for postgraduates and researchers concerned with semiconductor integrated circuit manufacture.' Chemistry in Britain

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