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OverviewFull Product DetailsAuthor: H. Richter (Institute for Semiconductor Physics, Franfurt (Oder), Germany) , P. Wagner (Wacker Siltronic AG, Burghausen, Germany) , G. Ritter (SEMITOOL Inc, Kalispell, USA)Publisher: Elsevier Science & Technology Imprint: Elsevier Science Ltd Volume: 81 Weight: 0.670kg ISBN: 9780080436098ISBN 10: 0080436099 Pages: 206 Publication Date: 08 September 1999 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Out of stock The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |