Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

Author:   H. Richter (Institute for Semiconductor Physics, Franfurt (Oder), Germany) ,  P. Wagner (Wacker Siltronic AG, Burghausen, Germany) ,  G. Ritter (SEMITOOL Inc, Kalispell, USA)
Publisher:   Elsevier Science & Technology
Volume:   81
ISBN:  

9780080436098


Pages:   206
Publication Date:   08 September 1999
Format:   Hardback
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment


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Author:   H. Richter (Institute for Semiconductor Physics, Franfurt (Oder), Germany) ,  P. Wagner (Wacker Siltronic AG, Burghausen, Germany) ,  G. Ritter (SEMITOOL Inc, Kalispell, USA)
Publisher:   Elsevier Science & Technology
Imprint:   Elsevier Science Ltd
Volume:   81
Weight:   0.670kg
ISBN:  

9780080436098


ISBN 10:   0080436099
Pages:   206
Publication Date:   08 September 1999
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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