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Author:   Rainer Behrisch ,  Wolfgang Eckstein
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   Softcover reprint of hardcover 1st ed. 2007
Volume:   110
Dimensions:   Width: 15.50cm , Height: 2.70cm , Length: 23.50cm
Weight:   0.801kg
ISBN:  

9783642079443

ISBN 10:   364207944
Pages:   509
Publication Date:   23 November 2010
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

and Overview.- Computer Simulation of the Sputtering Process.- Sputtering Yields.- Results of Molecular Dynamics Calculations.- Energy and Angular Distributions of Sputtered Species.- Chemical Sputtering.- Electronic Sputtering with Swift Heavy Ions.

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