Silicon Sensors and Circuits: On-chip compatibility

Author:   R.F. Wolffenbuttel
Publisher:   Chapman and Hall
Edition:   and ed.
Volume:   3
ISBN:  

9780412709708


Pages:   314
Publication Date:   30 November 1995
Format:   Hardback
Availability:   In Print   Availability explained
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Silicon Sensors and Circuits: On-chip compatibility


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Overview

Silicon sensors integrated with readout circuits on one chip are now being considered for a wide and growing range of applications. Technological compatibility constraints and the need for economic large-scale production are now the major concerns if these devices are to become widely used in industry and medicine. This is the first book to attempt to evaluate the real prospects and limitations of integrated silicon smart sensors. It provides a thorough introduction to and review of, the field, covering both technical and economic issues critical to the future success of this technology.

Full Product Details

Author:   R.F. Wolffenbuttel
Publisher:   Chapman and Hall
Imprint:   Chapman and Hall
Edition:   and ed.
Volume:   3
Dimensions:   Width: 14.00cm , Height: 2.20cm , Length: 21.60cm
Weight:   1.260kg
ISBN:  

9780412709708


ISBN 10:   0412709708
Pages:   314
Publication Date:   30 November 1995
Audience:   College/higher education ,  Professional and scholarly ,  General/trade ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

On-chip functional integration. Development of compatible micromachining processes in silicon. Compatibility of piezoelectric zinc oxide with silicon IC processing. Economics of on-chip functional integration. On-chip functional integration in micromechanical sensors. Sensor and circuit integration in biomedical applications. Smart sensors in automobiles. Conclusions. Glossary. Index.

Reviews

This book evaluates the real prospects and limitations of integrated silicon sensors. It provides a thorough introduction to the field, considering transduction effects, micromaching processes and zinc-oxide-on-silicon devices. - Aslib Book Guide; It provides a thorough introduction to and review of the field, covering both technical and economic issues critical to the future success of this techology. - Sensors and Materials; ...this book has a great deal to offer students and practicing control engineers throughout industry and research. - Control and Instrumentation; ...an interesting and thought-provoking account of integrated silicon-sensors, and would recommend it as a useful introduction to the topic...an in-depth study of the technology. - Measurement and Control


This book evaluates the real prospects and limitations of integrated silicon sensors. It provides a thorough introduction to the field, considering transduction effects, micromaching processes and zinc-oxide-on-silicon devices. - Aslib Book Guide; It provides a thorough introduction to and review of the field, covering both technical and economic issues critical to the future success of this techology. - Sensors and Materials; ...this book has a great deal to offer students and practicing control engineers throughout industry and research. - Control and Instrumentation; ...an interesting and thought-provoking account of integrated silicon-sensors, and would recommend it as a useful introduction to the topic...an in-depth study of the technology. - Measurement and Control


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