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OverviewSilicon sensors integrated with readout circuits on one chip are now being considered for a wide and growing range of applications. Technological compatibility constraints and the need for economic large-scale production are now the major concerns if these devices are to become widely used in industry and medicine. This is the first book to attempt to evaluate the real prospects and limitations of integrated silicon smart sensors. It provides a thorough introduction to and review of, the field, covering both technical and economic issues critical to the future success of this technology. Full Product DetailsAuthor: R.F. WolffenbuttelPublisher: Chapman and Hall Imprint: Chapman and Hall Edition: and ed. Volume: 3 Dimensions: Width: 14.00cm , Height: 2.20cm , Length: 21.60cm Weight: 1.260kg ISBN: 9780412709708ISBN 10: 0412709708 Pages: 314 Publication Date: 30 November 1995 Audience: College/higher education , Professional and scholarly , General/trade , Postgraduate, Research & Scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: In Print This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsOn-chip functional integration. Development of compatible micromachining processes in silicon. Compatibility of piezoelectric zinc oxide with silicon IC processing. Economics of on-chip functional integration. On-chip functional integration in micromechanical sensors. Sensor and circuit integration in biomedical applications. Smart sensors in automobiles. Conclusions. Glossary. Index.ReviewsThis book evaluates the real prospects and limitations of integrated silicon sensors. It provides a thorough introduction to the field, considering transduction effects, micromaching processes and zinc-oxide-on-silicon devices. - Aslib Book Guide; It provides a thorough introduction to and review of the field, covering both technical and economic issues critical to the future success of this techology. - Sensors and Materials; ...this book has a great deal to offer students and practicing control engineers throughout industry and research. - Control and Instrumentation; ...an interesting and thought-provoking account of integrated silicon-sensors, and would recommend it as a useful introduction to the topic...an in-depth study of the technology. - Measurement and Control This book evaluates the real prospects and limitations of integrated silicon sensors. It provides a thorough introduction to the field, considering transduction effects, micromaching processes and zinc-oxide-on-silicon devices. - Aslib Book Guide; It provides a thorough introduction to and review of the field, covering both technical and economic issues critical to the future success of this techology. - Sensors and Materials; ...this book has a great deal to offer students and practicing control engineers throughout industry and research. - Control and Instrumentation; ...an interesting and thought-provoking account of integrated silicon-sensors, and would recommend it as a useful introduction to the topic...an in-depth study of the technology. - Measurement and Control Author InformationTab Content 6Author Website:Countries AvailableAll regions |