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OverviewSilicon-on-Insulator (SOI) Technology reviews the past decade of research, presenting developments which have elapsed between the early SOI fabrication techniques and current VLSI and high-speed SOI circuits. The book explains the principles and the physics of SOI materials fabrication and characterization, SOI processing SOI MOSFET device physics, and the use of SOI material in novel device design. The performances of SOI circuits for VLSI/ULSI and for niche applications are also described. The SOI specialist will find this book invaluable as a source of compiled references covering the different aspects of SOI technology. For the non-specialist, the book serves as an excellent introduction to the topic with guidelines for possible future SOI activity. Simple descriptions of the materials, characterization, design, processing and device options are gathered from the literature, and detailed descriptions of the most important areas of SOI technology are presented. Silicon-on-Insulator Technology may also be used as a textbook for students who want to learn more about the fabrication techniques for silicon-on-insulator materials, the specific techniques developed to characterize thin silicon films, the physics of thin-film silicon devices and the potential of SOI and three-dimensional integrated circuits. Full Product DetailsAuthor: J.-P. ColingePublisher: Springer Imprint: Springer Edition: 1991 ed. Volume: 132 Dimensions: Width: 15.60cm , Height: 1.40cm , Length: 23.40cm Weight: 1.150kg ISBN: 9780792391500ISBN 10: 0792391500 Pages: 228 Publication Date: 31 March 1991 Audience: College/higher education , Professional and scholarly , Postgraduate, Research & Scholarly , Professional & Vocational Replaced By: 9780792380078 Format: Hardback Publisher's Status: Active Availability: In Print  This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of Contents1 — Introduction.- 2 — SOI Materials.- 3 — SOI Materials Characterization.- 4 — SOI CMOS Technology.- 5 — The SOI MOSFET.- 6 — Other SOI Devices.- 7 — The SOI MOSFET Operating in a Harsh Environment.- 8 — SOI Circuits.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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