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OverviewMicroengineering technology is beginning to emerge from the laboratory into the commercial world, and promises improvments in the cost, size and performance of devices used for sensing and measuring physical and chemical parameters. Future applications could have far reaching effects in diverse fields where miniaturization is an advantage, including applications in robotics, medicine, communications, electronic devices and many others. Although it grew from integrated circuit fabrication technology, microengineering requires input from several disciplines, among them physics, chemistry, mechanics and electronics. This book provides sufficient detail to satisfy all of the potential users and gives all the necessary information to exploit this technology. Readers should find this volume useful both as a tutorial introduction to the field and as a long-term reference. This book should be of interest to engineers, scientists and graduate students entering microengineering. Full Product DetailsAuthor: D. YoungPublisher: Chapman and Hall Imprint: Chapman and Hall Weight: 0.333kg ISBN: 9780412362705ISBN 10: 0412362708 Pages: 448 Publication Date: December 1994 Recommended Age: From 18 Audience: College/higher education , Professional and scholarly , General/trade , Postgraduate, Research & Scholarly , Professional & Vocational Format: Hardback Publisher's Status: Out of Print Availability: Out of stock  Table of ContentsPreliminary survey. Substrate materials. Etching of three dimensional structures. Thin films, doping and diffusion. Miscellaneous tools of microengineering. Metallisation and bonding. Surface micromachining. Measurement techniques. Theory and design of physical sensors. Theory and design of chemical sensors. Actuators and other devices. Field emitters. Display panels. Future development.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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