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OverviewThe interest in sensors, especially microsensors, dramatically increased during the last decade of the 20th century. This is due to decreasing prices of microsensors, increasingly more reliable fabrication technology, and wide experience in the design of microsensors. However, the possibilities for new sensor concepts are hardly explored, so the field is also expanding scientifically. We also observe that the applications of sensors is spreading into new fields and the incorporation of sensors in complete microsystems has begun to take shape. These proceedings report the results of research in sensor technology in The Netherlands and Belgium. They comprise design issues, sensor concepts, fabrication technology, systems aspects and packaging. Special aspects are the discussions of sensors for microfluidic systems as well as sensors for optical systems, integrated optics, and for optical telecommunication. This book should be of interest to engineers active in the field of sensors, sensor systems, microsystems, and M(O)EMS. Full Product DetailsAuthor: Miko ElwenspoekPublisher: Springer Imprint: Springer Edition: 2001 ed. Dimensions: Width: 15.50cm , Height: 1.40cm , Length: 23.50cm Weight: 1.060kg ISBN: 9780792370123ISBN 10: 0792370120 Pages: 200 Publication Date: 31 May 2001 Audience: College/higher education , Professional and scholarly , Undergraduate , Postgraduate, Research & Scholarly Format: Hardback Publisher's Status: Active Availability: In Print  This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsMeasurement System for Biochemical Analysis Based on Capillary Electrophoresis and Microscale Conductivity Detection.- Electro-Osmotic Flow Control in Microfluidics Systems.- Flow Sensing Using the Temperature Distribution along a Heated Microbeam.- Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller.- Technology for Spatial Light Modulators Based on Reflective Silicon Structures.- Building of a Highly Sensitive Two-Channel Integrated Optical Young Interferometer as the First Step Towards Constructing an Integrated Multichannel Interferometer Immunosensor.- High Speed Integrated Cmos Wavefront Sensor.- Automotive Sensor Development: Success Guaranteed?.- Study On The Behaviour of Various Si Substrate Geometries for Use as Passive Heat Sink.- Transfer Mould Packaging For Sensors.- Inexpensive Mems Packaging.- Low-Cost System to Determine the X-Y Position in a Resistive Touch-Screen.- High Capacity Silicon Load Cells.- Thermopile Design For A Cmos Wind-Sensor.- Investigation of Relative Humidity Sensors Based on Porous Silicon, Porous Polysilicon And Porous Silicon Carbide.- Limitations And Complementary Value Of Cryogenic Sf6-O2 And Bosch Plasma Etch Process For Silicon Micromachining.- Fabrication Of Mechanical Structures Using Macro-Porous Silicon.- Fine Tuning The Surface Roughness of Powder Blasted Glass Surfaces.- On the Feasibility of Using Antifuses as Low-Power Heating/Detecting Elements in Pellistor-Type Gas Sensors.- Amperometric Sensor for Detection of Redox Activity.- Accurate Quantitative Measurement of E-Field Distributions in “SOLID” Phantoms Using A Flexible Schottky Diode Sheet.- A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump.- HF Etching of Si-Oxides and Si-Nitrides for SurfaceMicromachining.- A Light Absorption Cell for ?-Tas With Koh/Ipa Etched 45° Mirrors in Silicon.- A Low-Cost And Accurate Conductance-Measurement System.- An Improved Sensor-Actuator System for Dynamic Surface Tension Measurements.- DNA Condensation Caused By Ligand Binding May Serve As A Sensor.- Forming A Rounded Convex Corner By Using Two-Step Anisotropic Koh Wet Etching.- An Accurate Measurement System for Thermopiles.- Packaged Stainless Steel Flowsensor.- Micro-Machining Of A Cryogenic Imaging Array Of Transition Edge X-Ray Microcalorimeters.- Enzyme Immobilisation Studies for Sensor Applications.- Micromachined SI-Well Scintillator Pixel Sensors for Thermal Neutron Detection.- Author Index.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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