Free Delivery Over $100
|
|
|||
|
||||
OverviewGiven the variety of different exhaust compounds and the various problems that they pose for the exhaust management system, the proper choice of such system can become a confusing and daunting task. This invaluable reference offers practical guidance on selecting an appropriate system for a given application. The author begins with facility layout, support facilities operation, and semiconductor process equipment, followed by exhaust types and challenges. Next, several chapters explore the different types of devices such as point-of-use devices, centralized wet scrubbers, and centralized VOC control. The book concludes with chapters devoted to emergency releases and examples of these systems in use. Full Product DetailsAuthor: J. Michael Sherer (Sherer Consulting Services, Gilbert, Arizona, USA)Publisher: Taylor & Francis Inc Imprint: CRC Press Inc Dimensions: Width: 15.60cm , Height: 1.70cm , Length: 23.40cm Weight: 0.453kg ISBN: 9781574447200ISBN 10: 1574447203 Pages: 212 Publication Date: 23 June 2005 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: In Print  This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsReviewsAuthor InformationJ. Michael Sherer Tab Content 6Author Website:Countries AvailableAll regions |
||||
