Run-to-Run Control in Semiconductor Manufacturing
Author:   James Moyne (University of Michigan, Ann Arbor, USA) ,  Enrique del Castillo (Pennsylvania State University, University Park, USA) ,  Arnon M. Hurwitz (Friendswood, Texas, USA) ,  Enrique del Castillo (Pennsylvania State University, University Park, USA)
Publisher:   Taylor & Francis Inc
ISBN:  

9780849311789


Pages:   366
Publication Date:   30 November 2000
Format:   Hardback
Availability:   In Print   Availability explained
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Run-to-Run Control in Semiconductor Manufacturing


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Author:   James Moyne (University of Michigan, Ann Arbor, USA) ,  Enrique del Castillo (Pennsylvania State University, University Park, USA) ,  Arnon M. Hurwitz (Friendswood, Texas, USA) ,  Enrique del Castillo (Pennsylvania State University, University Park, USA)
Publisher:   Taylor & Francis Inc
Imprint:   CRC Press Inc
Dimensions:   Width: 15.60cm , Height: 2.20cm , Length: 23.40cm
Weight:   0.625kg
ISBN:  

9780849311789


ISBN 10:   0849311780
Pages:   366
Publication Date:   30 November 2000
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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James Moyne, Enrique del Castillo, Arnon M. Hurwitz

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