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OverviewRun-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs, thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. Full Product DetailsAuthor: James Moyne , Enrique del Castillo (Pennsylvania State Univ.) , Arnon Max HurwitzPublisher: CRC Press Imprint: CRC Press ISBN: 9786610652884ISBN 10: 6610652880 Pages: 367 Publication Date: 01 January 2001 Audience: General/trade , General Format: Electronic book text Publisher's Status: Active Availability: Out of stock  The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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