Reactive Sputter Deposition

Author:   D Depla ,  S Mahieu
Publisher:   Springer
ISBN:  

9783540869504


Pages:   592
Publication Date:   02 September 2008
Format:   Undefined
Availability:   Out of stock   Availability explained


Our Price $65.87 Quantity:  
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Reactive Sputter Deposition


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Overview

The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Full Product Details

Author:   D Depla ,  S Mahieu
Publisher:   Springer
Imprint:   Springer
Dimensions:   Width: 23.40cm , Height: 3.10cm , Length: 15.60cm
Weight:   0.816kg
ISBN:  

9783540869504


ISBN 10:   3540869506
Pages:   592
Publication Date:   02 September 2008
Audience:   General/trade ,  General
Format:   Undefined
Publisher's Status:   Unknown
Availability:   Out of stock   Availability explained

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