Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. Thin Films, Volume 26.

Author:   Ronald A Powell ,  Stephen M Rossnagel (IBM T J Watson Research Center, New York)
Publisher:   Elsevier Science & Technology
ISBN:  

9786611054885


Pages:   419
Publication Date:   01 January 1999
Format:   Electronic book text
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Our Price $1045.44 Quantity:  
Add to Cart

Share |

Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. Thin Films, Volume 26.


Add your own review!

Overview

Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

Full Product Details

Author:   Ronald A Powell ,  Stephen M Rossnagel (IBM T J Watson Research Center, New York)
Publisher:   Elsevier Science & Technology
Imprint:   Elsevier Science & Technology
ISBN:  

9786611054885


ISBN 10:   661105488
Pages:   419
Publication Date:   01 January 1999
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

Reviews

Author Information

Tab Content 6

Author Website:  

Customer Reviews

Recent Reviews

No review item found!

Add your own review!

Countries Available

All regions
Latest Reading Guide

lgn

al

Shopping Cart
Your cart is empty
Shopping cart
Mailing List