Process Equipment and Materials Control In Integrated Circuit Manufacturing Iv
Author:   Dang ,  Kim Dang
Publisher:   SPIE Press
Volume:   Vol 3507
ISBN:  

9780819429667


Pages:   330
Publication Date:   31 October 1998
Format:   Paperback
Availability:   To order   Availability explained
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Process Equipment and Materials Control In Integrated Circuit Manufacturing Iv


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Overview

A discussion of process, equipment, and materials control in integrated circuit manufacturing. It examines real-time and run-to-run modelling and control in integrated circuit manufacturing, the process of optimization in integrated circuit manufacturing, and more.

Full Product Details

Author:   Dang ,  Kim Dang
Publisher:   SPIE Press
Imprint:   SPIE Press
Volume:   Vol 3507
ISBN:  

9780819429667


ISBN 10:   081942966
Pages:   330
Publication Date:   31 October 1998
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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