Proceedings of the Institute of General Physics Academy of the Sciences of the USSR: Lithography in Microelectronics
Author:   T.M. Makhviladze ,  Al Peabody (Translator)
Publisher:   Nova Science Publishers Inc
ISBN:  

9780941743303


Pages:   207
Publication Date:   01 March 1989
Format:   Hardback
Availability:   Out of stock   Availability explained


Our Price $356.40 Quantity:  
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Proceedings of the Institute of General Physics Academy of the Sciences of the USSR: Lithography in Microelectronics


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Overview

Translated from the Russian edition (Nauka Publishing House, 1987). Results are given from an experimental investigation of the kinetic principles of etching of polymer resists in low-temperature plasma, the processes of nonresistive ion lithography, and modifications of electron resist films by med

Full Product Details

Author:   T.M. Makhviladze ,  Al Peabody (Translator)
Publisher:   Nova Science Publishers Inc
Imprint:   Nova Biomedical
Weight:   0.201kg
ISBN:  

9780941743303


ISBN 10:   0941743306
Pages:   207
Publication Date:   01 March 1989
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Unknown
Availability:   Out of stock   Availability explained

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