Precursor Chemistry of Advanced Materials: CVD, ALD and Nanoparticles

Author:   Roland A. Fischer
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Edition:   Softcover reprint of hardcover 1st ed. 2005
Volume:   9
ISBN:  

9783642056888


Pages:   214
Publication Date:   12 February 2010
Format:   Paperback
Availability:   Out of print, replaced by POD   Availability explained
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Precursor Chemistry of Advanced Materials: CVD, ALD and Nanoparticles


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Overview

Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.

Full Product Details

Author:   Roland A. Fischer
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   Softcover reprint of hardcover 1st ed. 2005
Volume:   9
Dimensions:   Width: 15.50cm , Height: 1.20cm , Length: 23.50cm
Weight:   0.454kg
ISBN:  

9783642056888


ISBN 10:   3642056881
Pages:   214
Publication Date:   12 February 2010
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   Out of print, replaced by POD   Availability explained
We will order this item for you from a manufatured on demand supplier.

Table of Contents

M.D. Allendorf, A.M.B. van Mol: Gas-Phase Thermochemistry and Mechanism of Organometallic Tin Oxide CVD Precursors.- A. Devi, R.A. Fischer, J. Müller and R. Schmid: Materials Chemistry of Group-13 Nitrides.- M. Veith, S. Mathur: Single-Source-Precursor CVD: Alkoxy and Siloxy Aluminum Hydrides.- S. Schulz: CVD Deposition of Binary AlSb and GaSb Material Films - A Single-Source Approach.- M. Putkonen, L. Niinistö: Organometallic Precursors For Atomic Layer Deposition.- Ph. Serp, J.-C. Hierso and Ph. Kalck: Surface Reactivity of Transition Metal CVD Precursors: towards the Control of the Nucleation Step.- M.A. Malik and P. O'Brien: Organometallic and Metal-organic Precursors for Nanoparticles.

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