Precursor Chemistry of Advanced Materials: CVD, ALD and Nanoparticles

Author:   Roland A. Fischer
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Edition:   2005 ed.
Volume:   9
ISBN:  

9783540016052


Pages:   214
Publication Date:   29 September 2005
Format:   Hardback
Availability:   In Print   Availability explained
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Precursor Chemistry of Advanced Materials: CVD, ALD and Nanoparticles


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Overview

Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.

Full Product Details

Author:   Roland A. Fischer
Publisher:   Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Imprint:   Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Edition:   2005 ed.
Volume:   9
Dimensions:   Width: 15.50cm , Height: 1.40cm , Length: 23.50cm
Weight:   1.120kg
ISBN:  

9783540016052


ISBN 10:   3540016058
Pages:   214
Publication Date:   29 September 2005
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

M.D. Allendorf, A.M.B. van Mol: Gas-Phase Thermochemistry and Mechanism of Organometallic Tin Oxide CVD Precursors.- A. Devi, R.A. Fischer, J. Müller and R. Schmid: Materials Chemistry of Group-13 Nitrides.- M. Veith, S. Mathur: Single-Source-Precursor CVD: Alkoxy and Siloxy Aluminum Hydrides.- S. Schulz: CVD Deposition of Binary AlSb and GaSb Material Films - A Single-Source Approach.- M. Putkonen, L. Niinistö: Organometallic Precursors For Atomic Layer Deposition.- Ph. Serp, J.-C. Hierso and Ph. Kalck: Surface Reactivity of Transition Metal CVD Precursors: towards the Control of the Nucleation Step.- M.A. Malik and P. O'Brien: Organometallic and Metal-organic Precursors for Nanoparticles.

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