Plasma Processing of Semiconductors
Author:   P.F. Williams
Publisher:   Kluwer Academic Publishers
Edition:   1997 ed.
Volume:   336
ISBN:  

9780792345671


Pages:   613
Publication Date:   31 May 1997
Format:   Hardback
Availability:   In Print   Availability explained
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Plasma Processing of Semiconductors


Overview

Taken from the proceedings of a symposium in France in 1996, this text contains 28 contributions from 18 contributors, and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. The book should be suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Full Product Details

Author:   P.F. Williams
Publisher:   Kluwer Academic Publishers
Imprint:   Kluwer Academic Publishers
Edition:   1997 ed.
Volume:   336
Dimensions:   Width: 15.50cm , Height: 3.30cm , Length: 23.50cm
Weight:   2.320kg
ISBN:  

9780792345671


ISBN 10:   0792345673
Pages:   613
Publication Date:   31 May 1997
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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