Plasma Etching: Fundamentals and Applications
Author:   Minoru Sugawara
Publisher:   Oxford University Press
ISBN:  

9786610903733


Pages:   362
Publication Date:   01 January 1998
Format:   Electronic book text
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Plasma Etching: Fundamentals and Applications


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Overview

The focus of this book is on the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

Full Product Details

Author:   Minoru Sugawara
Publisher:   Oxford University Press
Imprint:   Oxford University Press
ISBN:  

9786610903733


ISBN 10:   6610903735
Pages:   362
Publication Date:   01 January 1998
Audience:   Children/juvenile ,  Children / Juvenile
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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