Plasma Deposition of Amorphous Silicon-Based Materials: Plasma-Materials Interactions

Author:   Giovanni Bruno ,  Pio Capezzuto ,  Arun Madan
Publisher:   Elsevier Science & Technology
ISBN:  

9786611054106


Pages:   324
Publication Date:   25 September 1995
Format:   Electronic book text
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Plasma Deposition of Amorphous Silicon-Based Materials: Plasma-Materials Interactions


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Overview

Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced.

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Author:   Giovanni Bruno ,  Pio Capezzuto ,  Arun Madan
Publisher:   Elsevier Science & Technology
Imprint:   Elsevier Science & Technology
ISBN:  

9786611054106


ISBN 10:   6611054103
Pages:   324
Publication Date:   25 September 1995
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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