Photomask Technology and Management-Annual Bacus Symposium 18Th
Author:   Abboud ,  Frank E. Abboud
Publisher:   SPIE Press
Volume:   v. 3546
ISBN:  

9780819430076


Pages:   686
Publication Date:   31 May 1999
Format:   Paperback
Availability:   To order   Availability explained
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Photomask Technology and Management-Annual Bacus Symposium 18Th


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Overview

This work brings together 68 papers from the 18th Bacus symposium on photomask technology and management. It covers photomask patterning, defects, inspection, repair, mask metrology and advanced mask metrology.

Full Product Details

Author:   Abboud ,  Frank E. Abboud
Publisher:   SPIE Press
Imprint:   SPIE Press
Volume:   v. 3546
ISBN:  

9780819430076


ISBN 10:   0819430072
Pages:   686
Publication Date:   31 May 1999
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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