Optical Microlithography Xi
Author:   Hove
Publisher:   SPIE Press
Volume:   Vol 3334
ISBN:  

9780819427793


Pages:   1106
Publication Date:   31 July 1998
Format:   Paperback
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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Optical Microlithography Xi


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Overview

A study of optical microlithography. It contains papers on subjects such as phase-shifting masks, CD control scanners, process optimization, and advanced masks.

Full Product Details

Author:   Hove
Publisher:   SPIE Press
Imprint:   SPIE Press
Volume:   Vol 3334
ISBN:  

9780819427793


ISBN 10:   0819427799
Pages:   1106
Publication Date:   31 July 1998
Audience:   Professional and scholarly ,  General/trade ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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